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Heat / Exchanger (200mm) |
l Back
l |
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| 1. |
Function |
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| TK-HE6KS/D 는 반도체 공정 중 가열 System 사용 중 이며, DRY-Etch
및 CVD 공정의 Wafer Chuck의 온도를 조절하는 장치이다. |
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고 신뢰성 |
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신속한 반응 시간 |
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실시간 장비 상태의 Monitoring 및 Local Control |
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누설 전류 보호 장치 |
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| 2. |
Specification |
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| MODEL |
TK-HE6KS |
TK-HE6KD |
| TYPE |
Sing Heat Exchanger |
Dual Heat Exchanger |
| DIMENSION |
W420 x D580 x H855 |
W460 x D820 x H1150 |
| WEIGHT |
120Kg |
220Kg |
| TEMP RANGE |
30℃ ~ 100℃ |
30℃ ~ 100℃ |
| TEMP CONTROL STABILITY |
±0.1℃ |
±0.1℃ |
| DISPLAY UNIT |
5" Graphic Touch Panel |
5" Graphic Touch Panel |
| TEMP MEASURING SENSOR |
RTD pt100Ω |
RTD pt100Ω |
| LIQUID FLOW & PRESSURE |
33LPM |
33LPM |
| COOLING FLUID |
4000w / 30℃ |
4000w / 30℃ |
| HEATING CAPACITY |
6000w / 40℃ |
5000w / 40℃ |
| POWER REQUIREMENT |
AC208V 30A (Normal 20A)z |
AC208V 60A (Normal 40A) |
| TEMPERATURE CONTROLLER |
Digital PID Controlled |
Digital PID Controlled |
| SYSTEM CONTROLLER |
Digital/Self Diagnosis Function |
Digital/Self Diagnosis Function |
| RESERVOIR VOLUME |
16ℓ |
30ℓ |
| PUMP |
2HP(1.5Kw) |
2HP(1.5Kw) |
| MATERIAL |
SUS316-Reservoir, Plumbing
and Fittings
SPC-Frame, Case |
SUS316-Reservoir, Plumbing
and Fittings
SPC-Frame, Case |
| LIQUID FLOW & PRESSURE |
8±2LPM / 3.0±0.5kg/㎠ |
15±2LPM / 3.0±0.5kg/㎠ |
| OUTSIDE MATERIAL |
Resistivity Filter Tank &
Sensor (0~20mΩ) |
Resistivity Filter Tank &
Sensor (0~20mΩ) |
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